Structural, morphological and optical properties of indium oxide film by sol gel spin coating

Abstract

Indium oxide (In2O3) film has been deposited onto the glass substrates by the sol-gel spin coating method. The structural, morphological and optical properties of the film were investigated. In(III)Chloride, ethanol and hydrogen chloride (HCl) were used as a starting material, solvent and stabilizer, respectively. For investigation of crystal structure and orientation of the films, X-ray diffraction (XRD) patterns were used. The grain size of the film was calculated using the Scherrer formula. Using a spectrophotometer having an integrating sphere carried out the optical absorbance and transmittance measurements. The optical absorption studies revealed the transitions having the direct band gap. The optical parameters (the refractive index, extinction coefficient) were analyzed by using the reflectance and transmittance spectra. The refractive index dispersion curve shows that the In2O3 film obeys the single oscillator model.